Wastewater reclamation in a wafer manufacturing plant

This project investigated the potential of reclaiming wastewater from a wafer manufacturing plant using the proprietary Exxflow dynamic membrane technology with the right chemical pre-treatment. Wastewater discharged from the factory benches in the wafer manufacturing process was properly segregate...

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Bibliographic Details
Main Author: Chen, Jingping.
Other Authors: Chui, Peng Cheong
Format: Theses and Dissertations
Language:English
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/11990
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Institution: Nanyang Technological University
Language: English
Description
Summary:This project investigated the potential of reclaiming wastewater from a wafer manufacturing plant using the proprietary Exxflow dynamic membrane technology with the right chemical pre-treatment. Wastewater discharged from the factory benches in the wafer manufacturing process was properly segregated and chemically treated before passing through the Exxflow dynamic membrane. MgCl2 was used for chemical pre-treatment. Based on study carried out, the optimum dosage of MgCl2 was determined as 0.25 ml Mg2+/L.