Design and development of silicon condenser microphone with a novel diaphragm-backplate structure

• Main Author: Kek, Huat Soon.
• Other Authors: Lin, Rongming
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Product design
• Online Access: http://hdl.handle.net/10356/13481
• Institution: Nanyang Technological University

In this project, a novel diaphragm-backplate structure for silicon condenser microphone is proposed. A single deep corrugation technique is applied to the microphone diaphragm to reduce its initial stress and to improve its performance. The advantage of this technique is its ability to reduce the in...