Control of manufacturing systems with downstream batch processors

• المؤلف الرئيسي: Cheng, Tajan John Benedict
• مؤلفون آخرون: Stanley Gershwin
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Manufacturing::Production management; DRNTU::Engineering::Electrical and electronic engineering::Applications of electronics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/13611

Batch processors can concurrently process more than one batch and are regularly used in the semiconductor manufacturing industry, particularly in the wafer fabrication stage. The reentrant nature of the wafer fab and the incompatibility of jobs from different job families, combined with the typicall...