Control of manufacturing systems with downstream batch processors

• 主要作者: Cheng, Tajan John Benedict
• 其他作者: Stanley Gershwin
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Manufacturing::Production management; DRNTU::Engineering::Electrical and electronic engineering::Applications of electronics
• 在線閱讀: https://hdl.handle.net/10356/13611
• 機構: Nanyang Technological University

Batch processors can concurrently process more than one batch and are regularly used in the semiconductor manufacturing industry, particularly in the wafer fabrication stage. The reentrant nature of the wafer fab and the incompatibility of jobs from different job families, combined with the typicall...