A study of air molecular contamination (AMC) and volatile organic compounds (VOC) in new AMC/VOC controlled cleanroom

• المؤلف الرئيسي: Wong, Chee Kong
• مؤلفون آخرون: Zhong Zhaowei
• التنسيق: Final Year Project
• اللغة: English
• منشور في: Nanyang Technological University 2020
• الموضوعات: Engineering::Mechanical engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/136645
• المؤسسة: Nanyang Technological University

Airborne Molecular Contaminants (AMC) may cause different flaws on an electronic device [1]. It is especially so in the semiconductor manufacturing sector. Monitoring of AMC is becoming essential when it comes to managing cleanroom for the present production of semiconductor devices as it advances i...