Grating-coupled plasmonic sensor for sucrose sensing fabricated using optical fiber-based interference lithography (OFIL) system

• Main Authors: Pae, Jian Yi, Sahoo, Pankaj Kumar, Murukeshan, Vadakke Matham
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics; Gratings; Interference Lithography
• Online Access: https://hdl.handle.net/10356/141000
• Institution: Nanyang Technological University

A grating-coupled plasmonic sensor for sucrose sensing was fabricated and experimentally validated in the spectral interrogation mode. The grating structures were fabricated on a silicon wafer using an optical fiber-based interference lithography (OFIL) system. The system can be easily reconfigured to write 1D grating features with a periodicity ranging from 514 nm to 1,646 nm. The patterned area can also be controlled from 5 mm down to 0.6 mm for energy efficient, device scale fabrication. The results demonstrated the potential of using the OFIL system as a highly versatile and low-cost method to fabricate grating-coupled plasmonic sensors for healthcare applications.