Synthesis and formation mechanism of all-organic block copolymer-directed templating of laser-induced crystalline silicon nanostructures

This report describes the generation of three-dimensional (3D) crystalline silicon continuous network nanostructures by coupling all-organic block copolymer self-assembly-directed resin templates with low-temperature silicon chemical vapor deposition and pulsed excimer laser annealing. Organic 3D me...

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Bibliographic Details
Main Authors: Tan, Kwan Wee, Werner, Jörg G., Goodman, Matthew D., Kim, Ha Seong, Jung, Byungki, Sai, Hiroaki, Braun, Paul V., Thompson, Michael O., Wiesner, Ulrich
Other Authors: School of Materials Science and Engineering
Format: Article
Language:English
Published: 2020
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Online Access:https://hdl.handle.net/10356/142474
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Institution: Nanyang Technological University
Language: English
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