Synthesis and formation mechanism of all-organic block copolymer-directed templating of laser-induced crystalline silicon nanostructures
This report describes the generation of three-dimensional (3D) crystalline silicon continuous network nanostructures by coupling all-organic block copolymer self-assembly-directed resin templates with low-temperature silicon chemical vapor deposition and pulsed excimer laser annealing. Organic 3D me...
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Main Authors: | , , , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2020
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/142474 |
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Institution: | Nanyang Technological University |
Language: | English |
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