Laser microprocessing of sapphire

• Main Author: Lye, Celescia Siew Mun
• Other Authors: Lam Yee Cheong
• Format: Thesis-Master by Research
• Language: English
• Published: Nanyang Technological University 2020
• Subjects: Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/144687
• Institution: Nanyang Technological University

Sapphire is a substrate in many applications; for example, in watch covers, phone displays, integrated circuits, optoelectronics and light emitting diodes (LEDs). To be useful for these applications, sapphire boules have to be separated into wafers and chips for further processing. This thesis inves...