A novel fabrication technique for three-dimensional concave nanolens arrays

• Main Authors: Duan, Tianli, Xu, Kang, Liu, Zhihong, Gu, Chenjie, Pan, Jisheng, Ang, Diing Shenp, Zhang, Rui, Wang, Yao, Ma, Xuhang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Concave Nanolens; Three-dimensional Lens Array
• Online Access: https://hdl.handle.net/10356/145437
• Institution: Nanyang Technological University

A novel facile technique is proposed for fabricating three-dimensional (3D) concave nanolens arrays on a silicon substrate. The technique leverages an inherent characteristic of the polymethyl methacrylate (PMMA) resist during inductively coupled plasma (ICP) etching. The tendency for plasma ions to...