Mechanism and effects of surface morphology on absorption characteristics in ultrashort pulse laser processing of sapphire

For ultrashort pulse laser processing of a sapphire wafer, nonlinear absorption of laser energy at sufficiently high laser intensity is essential. This study found that in ultrashort pulse laser processing of a sapphire wafer, its surface morphology can have a significant effect on nonlinear absorpt...

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Bibliographic Details
Main Authors: Lye, Celescia Siew Mun, Wang, Z. K., Lam, Yee Cheong
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2021
Subjects:
Online Access:https://hdl.handle.net/10356/146198
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Institution: Nanyang Technological University
Language: English