Fabrication of aligned carbon nanotubes on Cu catalyst by dc plasma-enhanced catalytic decomposition

• Main Authors: Zhang, Zhejuan, Shakerzadeh, Maziar, Tay, Beng Kang, Li, Xiaocheng, Tan, Chong Wei, Lin, LiFeng, Guo, Pingsheng, Feng, Tao, Sun, Zhuo
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering; Cooper Catalyst; Aligned Carbon Nanotubes
• Online Access: https://hdl.handle.net/10356/151176
• Institution: Nanyang Technological University

Aligned multi-walled carbon nanotubes (ACNTs) are deposited using copper (Cu) catalyst on Chromium (Cr)-coated substrate by plasma-enhanced chemical vapor deposition at temperature of 700 °C. Acetylene gas has been used as the carbon source while ammonia is used for diluting and etching. The thickne...