Design and development of highly textured boron nitride thin films for electronic devices

• 主要作者: Chng, Soon Siang
• 其他作者: Teo Hang Tong Edwin
• 格式: Thesis-Doctor of Philosophy
• 語言: English
• 出版: Nanyang Technological University 2021
• 主題: Engineering::Electrical and electronic engineering::Semiconductors; Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• 在線閱讀: https://hdl.handle.net/10356/152095

This thesis focuses on the alignment engineering (i.e. the orientation of the basal plane to the substrate surface) and the isotopic engineering (i.e. the modification of the isotopic composition of the compound) of hexagonal boron nitride (h-BN) thin films for its applications on electronic devices...