Design and development of highly textured boron nitride thin films for electronic devices

• Main Author: Chng, Soon Siang
• Other Authors: Teo Hang Tong Edwin
• Format: Thesis-Doctor of Philosophy
• Language: English
• Published: Nanyang Technological University 2021
• Subjects: Engineering::Electrical and electronic engineering::Semiconductors; Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/152095
• Institution: Nanyang Technological University

This thesis focuses on the alignment engineering (i.e. the orientation of the basal plane to the substrate surface) and the isotopic engineering (i.e. the modification of the isotopic composition of the compound) of hexagonal boron nitride (h-BN) thin films for its applications on electronic devices...