Magnetron sputtered nc-TiN/a-SiNx nanocomposite thin films with high hardness and high toughness

Magnetron sputtered nc-TiN/a-SiNx nanocomposite thin films with high hardness and high toughness

This project focuses on the study of hardening and toughening mechanisms for nanocomposite thin films. The aim of this project is to study the relationship between microstructure, hardness and toughness, therefore to obtain a thin film with high hardness and at the same time high toughness. Reactive...

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Bibliographic Details
Main Author: Sun, Deen
Other Authors: Sam Zhang Shanyong
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/6414
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Institution: Nanyang Technological University

Internet

https://hdl.handle.net/10356/6414

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