Magnetron sputtered nc-TiN/a-SiNx nanocomposite thin films with high hardness and high toughness

• Main Author: Sun, Deen
• Other Authors: Sam Zhang Shanyong
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/6414
• Institution: Nanyang Technological University

This project focuses on the study of hardening and toughening mechanisms for nanocomposite thin films. The aim of this project is to study the relationship between microstructure, hardness and toughness, therefore to obtain a thin film with high hardness and at the same time high toughness. Reactive...