Defects of thin films on silicon wafer

• Main Author: Tang, Shiau Khee.
• Other Authors: Mridha, Shahjahan
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5111
• Institution: Nanyang Technological University

Borophosphosilicate glass (BPSG) is a popular dielectric thin film used in the fabrication of semiconductor devices. However, the addition of dopants like boron and phosphorus creates some defects on these thin films and that reduces the reliability of IC devices. In this work, a systematic investig...