Defects of thin films on silicon wafer

Borophosphosilicate glass (BPSG) is a popular dielectric thin film used in the fabrication of semiconductor devices. However, the addition of dopants like boron and phosphorus creates some defects on these thin films and that reduces the reliability of IC devices. In this work, a systematic investig...

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Bibliographic Details
Main Author:	Tang, Shiau Khee.
Other Authors:	Mridha, Shahjahan
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/5111
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5111
record_format	dspace
spelling	sg-ntu-dr.10356-51112020-06-01T11:56:48Z Defects of thin films on silicon wafer Tang, Shiau Khee. Mridha, Shahjahan School of Materials Science & Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Borophosphosilicate glass (BPSG) is a popular dielectric thin film used in the fabrication of semiconductor devices. However, the addition of dopants like boron and phosphorus creates some defects on these thin films and that reduces the reliability of IC devices. In this work, a systematic investigation was carried out to characterize the defect in BPSG films. Doctor of Philosophy (SME) 2008-09-17T10:20:16Z 2008-09-17T10:20:16Z 2002 2002 Thesis http://hdl.handle.net/10356/5111 Nanyang Technological University 170 p. application/pdf
institution	Nanyang Technological University
building	NTU Library
country	Singapore
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Tang, Shiau Khee. Defects of thin films on silicon wafer
description	Borophosphosilicate glass (BPSG) is a popular dielectric thin film used in the fabrication of semiconductor devices. However, the addition of dopants like boron and phosphorus creates some defects on these thin films and that reduces the reliability of IC devices. In this work, a systematic investigation was carried out to characterize the defect in BPSG films.
author2	Mridha, Shahjahan
author_facet	Mridha, Shahjahan Tang, Shiau Khee.
format	Theses and Dissertations
author	Tang, Shiau Khee.
author_sort	Tang, Shiau Khee.
title	Defects of thin films on silicon wafer
title_short	Defects of thin films on silicon wafer
title_full	Defects of thin films on silicon wafer
title_fullStr	Defects of thin films on silicon wafer
title_full_unstemmed	Defects of thin films on silicon wafer
title_sort	defects of thin films on silicon wafer
publishDate	2008
url	http://hdl.handle.net/10356/5111
_version_	1681057877209382912

Defects of thin films on silicon wafer

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