Micro pump using shape memory alloy thin films

• المؤلف الرئيسي: Charlie, Eric.
• مؤلفون آخرون: Huang Weimin
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2009
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/16738
• المؤسسة: Nanyang Technological University

The advance of microsystems has made micropump, as one of the most important components in microsystems, received a lot of attention in research and development. Micropump can be actuated by various mechanisms, such as electrostatic, piezoelectric, electromagnetic and shape memory alloy thin film....