Micro pump using shape memory alloy thin films

• Main Author: Charlie, Eric.
• Other Authors: Huang Weimin
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/16738
• Institution: Nanyang Technological University

The advance of microsystems has made micropump, as one of the most important components in microsystems, received a lot of attention in research and development. Micropump can be actuated by various mechanisms, such as electrostatic, piezoelectric, electromagnetic and shape memory alloy thin film....