NiTi shape memory alloy thin film based microgripper

NiTi shape memory alloy thin film based microgripper

The objectives of this project are to produce NiTi thin film that exhibits Shape Memory Effect (SME) onto a cantilever beam and to produce a microgripper of size about 750x350x350 micrometer using the cantilever structure.

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Bibliographic Details
Main Author: Tan, Jun Ping.
Other Authors: Huang, Weimin
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/6464
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Institution: Nanyang Technological University

Internet

http://hdl.handle.net/10356/6464

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