Co2 laser annealing of Niti (shape memory) thin films for mems applications

• المؤلف الرئيسي: He, Qiang.
• مؤلفون آخرون: Huang, Weimin
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/5786

A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.