Co2 laser annealing of Niti (shape memory) thin films for mems applications

• Main Author: He, Qiang.
• Other Authors: Huang, Weimin
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5786
• Institution: Nanyang Technological University

A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.