Co2 laser annealing of Niti (shape memory) thin films for mems applications

A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.

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Bibliographic Details
Main Author:	He, Qiang.
Other Authors:	Huang, Weimin
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/5786
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5786
record_format	dspace
spelling	sg-ntu-dr.10356-57862023-03-11T17:24:45Z Co2 laser annealing of Niti (shape memory) thin films for mems applications He, Qiang. Huang, Weimin School of Mechanical and Production Engineering Hong, Minghui DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size. Master of Engineering (MPE) 2008-09-17T10:59:02Z 2008-09-17T10:59:02Z 2004 2004 Thesis http://hdl.handle.net/10356/5786 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films He, Qiang. Co2 laser annealing of Niti (shape memory) thin films for mems applications
description	A new technique is presented to characterize the shape memory effect in a local area on a micrometer scale, because all traditional techniques, such as differential scanning calorimeter and resistance measurement, are not applicable in a thin film of such a size.
author2	Huang, Weimin
author_facet	Huang, Weimin He, Qiang.
format	Theses and Dissertations
author	He, Qiang.
author_sort	He, Qiang.
title	Co2 laser annealing of Niti (shape memory) thin films for mems applications
title_short	Co2 laser annealing of Niti (shape memory) thin films for mems applications
title_full	Co2 laser annealing of Niti (shape memory) thin films for mems applications
title_fullStr	Co2 laser annealing of Niti (shape memory) thin films for mems applications
title_full_unstemmed	Co2 laser annealing of Niti (shape memory) thin films for mems applications
title_sort	co2 laser annealing of niti (shape memory) thin films for mems applications
publishDate	2008
url	http://hdl.handle.net/10356/5786
_version_	1761781896747941888

Co2 laser annealing of Niti (shape memory) thin films for mems applications

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