Property study of phase change materials for nanopatterning

• Main Author: Khoo, Chee Ying.
• Other Authors: Gan Chee Lip
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/15327
• Institution: Nanyang Technological University

A lithography technique called “laser thermal lithography” was proposed for fabricating nanometer-sized structure beyond the optical diffraction limit. It has great potential as an optical disk mastering process for ultra-high density optical Read Only Memory (ROM) technology. By utilizing the idea...