Carbon based materials for MEMS applications

• Main Author: Tan, Chong Wei
• Other Authors: Miao Jianmin
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Mechanical engineering::Prototyping
• Online Access: https://hdl.handle.net/10356/15557
• Institution: Nanyang Technological University

CNTs have been a subject of interest by many researchers since its discovery by Ijima in 1991. With its excellent electrical and mechanical properties, many researchers have exploited its advantageous electrical properties for use in integrated circuits interconnects and field emission devices. Howe...