Toward miniaturizing microelectronics using covalent organic framework dielectric
As miniaturization of microelectronics reaches sub-10 nm scale, signal crosstalk and parasitic resistive-capacitive delay significantly limit device performance. While low dielectric constant (low-κ) dielectrics are widely recognized to address such issue, their poor thermal conductivity impedes hea...
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| Main Authors: | , |
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| 格式: | Article |
| 語言: | English |
| 出版: |
2022
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| 在線閱讀: | https://hdl.handle.net/10356/155936 |
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