Radio frequency microelectromechanical systems (RF-MEMS) systems design

Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components such as filters and oscillators that generate electrical activity via mechanical movement and electrical excitation, composed of inductors and capacitors and widely applied in communication systems whi...

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Main Author: Chan, Winston Qingyao.
Other Authors: Wang Hong
Format: Final Year Project
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/15801
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-158012023-07-07T16:04:01Z Radio frequency microelectromechanical systems (RF-MEMS) systems design Chan, Winston Qingyao. Wang Hong School of Electrical and Electronic Engineering DSO National Laboratories DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components such as filters and oscillators that generate electrical activity via mechanical movement and electrical excitation, composed of inductors and capacitors and widely applied in communication systems which occupy the upper end of the RF spectrum. They introduce reconfigurability and fast, accurate switching which enhances frequency selectivity. Generally, RFMEMs are classified according to their figures of merit (=1 / (2π x Ron x Coff)) and performance indicators like power handling, insertion loss, life cycle, switching speed and isolation. Various actuation mechanisms were compared, and electrostatic scheme was chosen because of the criticality of low power consumption in large-scaled systems. Previous work on RFMEMs was reviewed, and switching speed was selected as the focus of this project because of fewer works done in this aspect. Mechanical dynamics of RFMEMs such as stiffness, Young’s Modulus, poisson ratio and residual stress were examined. Failure mechanisms were scrutinized and fast-switching concepts were studied. Design was commenced based on a boat-like geometry for the RFMEMs bridge that boosts the spring constant and implemented in a co-planar wave electromagnetic configuration. The fabrication process which manipulates baking parameters to reflow and form the angled edges was described. Computation of capacitances and simulations of mechanical resonance and scattering parameters for each switch state were performed using various software programs and analysed. Due to glitches in mask fabrication and restrictions levied on EEE undergraduates regarding clean-room equipment usage, the switch has not yet been fabricated and thus measurement testing cannot be done. Based on results of mechanical and electromagnetic behaviour from simulation, the project goal of attaining faster switching speeds was achieved, whereas the scattering parameters indicated a low capacitance ratio. Therefore, it is preferable to use the switch as a varactor rather than a switch. But the geometry can be applied to metal-contact switches to improve the capacitance ratio. Bachelor of Engineering 2009-05-15T07:02:19Z 2009-05-15T07:02:19Z 2009 2009 Final Year Project (FYP) http://hdl.handle.net/10356/15801 en Nanyang Technological University 111 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
Chan, Winston Qingyao.
Radio frequency microelectromechanical systems (RF-MEMS) systems design
description Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components such as filters and oscillators that generate electrical activity via mechanical movement and electrical excitation, composed of inductors and capacitors and widely applied in communication systems which occupy the upper end of the RF spectrum. They introduce reconfigurability and fast, accurate switching which enhances frequency selectivity. Generally, RFMEMs are classified according to their figures of merit (=1 / (2π x Ron x Coff)) and performance indicators like power handling, insertion loss, life cycle, switching speed and isolation. Various actuation mechanisms were compared, and electrostatic scheme was chosen because of the criticality of low power consumption in large-scaled systems. Previous work on RFMEMs was reviewed, and switching speed was selected as the focus of this project because of fewer works done in this aspect. Mechanical dynamics of RFMEMs such as stiffness, Young’s Modulus, poisson ratio and residual stress were examined. Failure mechanisms were scrutinized and fast-switching concepts were studied. Design was commenced based on a boat-like geometry for the RFMEMs bridge that boosts the spring constant and implemented in a co-planar wave electromagnetic configuration. The fabrication process which manipulates baking parameters to reflow and form the angled edges was described. Computation of capacitances and simulations of mechanical resonance and scattering parameters for each switch state were performed using various software programs and analysed. Due to glitches in mask fabrication and restrictions levied on EEE undergraduates regarding clean-room equipment usage, the switch has not yet been fabricated and thus measurement testing cannot be done. Based on results of mechanical and electromagnetic behaviour from simulation, the project goal of attaining faster switching speeds was achieved, whereas the scattering parameters indicated a low capacitance ratio. Therefore, it is preferable to use the switch as a varactor rather than a switch. But the geometry can be applied to metal-contact switches to improve the capacitance ratio.
author2 Wang Hong
author_facet Wang Hong
Chan, Winston Qingyao.
format Final Year Project
author Chan, Winston Qingyao.
author_sort Chan, Winston Qingyao.
title Radio frequency microelectromechanical systems (RF-MEMS) systems design
title_short Radio frequency microelectromechanical systems (RF-MEMS) systems design
title_full Radio frequency microelectromechanical systems (RF-MEMS) systems design
title_fullStr Radio frequency microelectromechanical systems (RF-MEMS) systems design
title_full_unstemmed Radio frequency microelectromechanical systems (RF-MEMS) systems design
title_sort radio frequency microelectromechanical systems (rf-mems) systems design
publishDate 2009
url http://hdl.handle.net/10356/15801
_version_ 1772826993901961216