Variation of growth parameters for density controlled PECVD carbon nanotubes

Carbon Nanotubes (CNTs) has been substantially an interesting topic of research due to its unique properties which is seen as a promising prospect for a variety of applications especially in the area of field emitters. It had been published that this property of CNTs may deteriorate due to the high...

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Main Author: Toh, Han Cheng
Other Authors: Tay Beng Kang
Format: Final Year Project
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/15812
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-158122023-07-07T16:11:02Z Variation of growth parameters for density controlled PECVD carbon nanotubes Toh, Han Cheng Tay Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics Carbon Nanotubes (CNTs) has been substantially an interesting topic of research due to its unique properties which is seen as a promising prospect for a variety of applications especially in the area of field emitters. It had been published that this property of CNTs may deteriorate due to the high density of CNTs and hence many methods have been done to reduce the density of CNTs. In this project, the growths of CNTs were done in PECVD system whereby reactive gas such as ammonia and acetylene as carbon feedstock gas was used to supplied into the reactive chamber.Pre-treatment such as annealing and etching was performed on the nickel catalyst film. Variations of these two growth parameters has shown to have direct relation with the density of CNTs. Results of these processes reveals a correlation between annealing and etching conditions with the diameters and densities of these CNTs. Few analysis methods were made on the diameter and density of CNTs for verification of these trends. Raman analysis was also conducted on the samples. Bachelor of Engineering 2009-05-15T07:31:44Z 2009-05-15T07:31:44Z 2009 2009 Final Year Project (FYP) http://hdl.handle.net/10356/15812 en Nanyang Technological University 99 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Toh, Han Cheng
Variation of growth parameters for density controlled PECVD carbon nanotubes
description Carbon Nanotubes (CNTs) has been substantially an interesting topic of research due to its unique properties which is seen as a promising prospect for a variety of applications especially in the area of field emitters. It had been published that this property of CNTs may deteriorate due to the high density of CNTs and hence many methods have been done to reduce the density of CNTs. In this project, the growths of CNTs were done in PECVD system whereby reactive gas such as ammonia and acetylene as carbon feedstock gas was used to supplied into the reactive chamber.Pre-treatment such as annealing and etching was performed on the nickel catalyst film. Variations of these two growth parameters has shown to have direct relation with the density of CNTs. Results of these processes reveals a correlation between annealing and etching conditions with the diameters and densities of these CNTs. Few analysis methods were made on the diameter and density of CNTs for verification of these trends. Raman analysis was also conducted on the samples.
author2 Tay Beng Kang
author_facet Tay Beng Kang
Toh, Han Cheng
format Final Year Project
author Toh, Han Cheng
author_sort Toh, Han Cheng
title Variation of growth parameters for density controlled PECVD carbon nanotubes
title_short Variation of growth parameters for density controlled PECVD carbon nanotubes
title_full Variation of growth parameters for density controlled PECVD carbon nanotubes
title_fullStr Variation of growth parameters for density controlled PECVD carbon nanotubes
title_full_unstemmed Variation of growth parameters for density controlled PECVD carbon nanotubes
title_sort variation of growth parameters for density controlled pecvd carbon nanotubes
publishDate 2009
url http://hdl.handle.net/10356/15812
_version_ 1772827441100750848