Multi-foci division of nonlinear energy absorption on ultrashort pulse laser singulation of sapphire wafers

• Main Authors: Lye, Celescia Siew Mun, Wang, Zhongke, Lam, Yee Cheong
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2022
• Subjects: Engineering::Mechanical engineering; Pulse Energy Division; Spatial Proximity of Foci
• Online Access: https://hdl.handle.net/10356/159401
• Institution: Nanyang Technological University

The multi-foci division of through thickness nonlinear pulse energy absorption on ultrashort pulse laser singulation of single side polished sapphire wafers has been investigated. Firstly, it disclosed the enhancement of energy absorption by the total internal reflection of the laser beam exiting fr...