Zou, Y., Li, J., Cheng, C., Wang, Z., Ong, A. J., Goei, R., . . . Engineering, S. o. M. S. a. (2022). Atomic layer deposition of palladium thin film from palladium (II) hexafluoroacetylacetonate and ozone reactant.
Chicago Style CitationZou, Yiming, et al. Atomic Layer Deposition of Palladium Thin Film From Palladium (II) Hexafluoroacetylacetonate and Ozone Reactant. 2022.
MLA CitationZou, Yiming, et al. Atomic Layer Deposition of Palladium Thin Film From Palladium (II) Hexafluoroacetylacetonate and Ozone Reactant. 2022.
Warning: These citations may not always be 100% accurate.