Zou, Y., Li, J., Cheng, C., Wang, Z., Ong, A. J., Goei, R., . . . Engineering, S. o. M. S. a. (2022). Atomic layer deposition of palladium thin film from palladium (II) hexafluoroacetylacetonate and ozone reactant.
Chicago Style CitationZou, Yiming, et al. Atomic Layer Deposition of Palladium Thin Film From Palladium (II) Hexafluoroacetylacetonate and Ozone Reactant. 2022.
MLA引文Zou, Yiming, et al. Atomic Layer Deposition of Palladium Thin Film From Palladium (II) Hexafluoroacetylacetonate and Ozone Reactant. 2022.
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