Micro-patterning of metallic electrodes for dielectric elastomer actuators

This project aims to develop reliable compliant electrodes by patterning metallic thin film. The metallic electrode is formed in a pattern which allows lateral flexibility in order allow lateral stretching of the dielectric actuation. The designed patterns electrode on elastomer is formed by chemica...

全面介紹

Saved in:
書目詳細資料
主要作者: Sim, Thiam Ling.
其他作者: School of Mechanical and Aerospace Engineering
格式: Final Year Project
語言:English
出版: 2009
主題:
在線閱讀:http://hdl.handle.net/10356/16199
標簽: 添加標簽
沒有標簽, 成為第一個標記此記錄!
id sg-ntu-dr.10356-16199
record_format dspace
spelling sg-ntu-dr.10356-161992023-03-04T19:36:00Z Micro-patterning of metallic electrodes for dielectric elastomer actuators Sim, Thiam Ling. School of Mechanical and Aerospace Engineering Lau, Gih Keong DRNTU::Engineering::Manufacturing This project aims to develop reliable compliant electrodes by patterning metallic thin film. The metallic electrode is formed in a pattern which allows lateral flexibility in order allow lateral stretching of the dielectric actuation. The designed patterns electrode on elastomer is formed by chemical etching and lithography. The metallic electrodes on elastomer are to be tested to ensure the mechanical integrity. Methods of metal deposition are investigated in this project. This work has attempted e-beam evaporation and thermal evaporation for metal deposition, and application of ultra-thin copper foil on soft dielectric elastomer like 3M VHB and PDMS. Finally, copper foil was chosen as the electrode material due to its faster and easier handling, and lower cost. In addition, it has the highest electrical conductivity among all. Fabrication of the dielectric elastomer actuator is introduced. 3M VHB 9473 tape and copper foil were selected as the dielectric layer and electrode. Dry film negative photoresist, ETERTEC HP-3410 was used to form the patterned masking on the substrate of copper foil. Meander pattern is designed for compliant electrodes in this project. Meander pattern is able to concentrate the elongation of the electrode in one direction. Finally, high-voltage actuation testing was conducted. The high-voltage testing shows plain electrodes of copper foil restrain elastomer layer and do not allow a planar expansion. On the other hand, meandered pattern electrodes (a design codenamed as S100-C100-G100) of copper foil show an expansion in width by 2.58%. A silver grease electrodes specimen also had been tested and result 6.71% of expansion in area at the same voltage. Bachelor of Engineering (Mechanical Engineering) 2009-05-22T06:23:02Z 2009-05-22T06:23:02Z 2009 2009 Final Year Project (FYP) http://hdl.handle.net/10356/16199 en Nanyang Technological University 84 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Manufacturing
spellingShingle DRNTU::Engineering::Manufacturing
Sim, Thiam Ling.
Micro-patterning of metallic electrodes for dielectric elastomer actuators
description This project aims to develop reliable compliant electrodes by patterning metallic thin film. The metallic electrode is formed in a pattern which allows lateral flexibility in order allow lateral stretching of the dielectric actuation. The designed patterns electrode on elastomer is formed by chemical etching and lithography. The metallic electrodes on elastomer are to be tested to ensure the mechanical integrity. Methods of metal deposition are investigated in this project. This work has attempted e-beam evaporation and thermal evaporation for metal deposition, and application of ultra-thin copper foil on soft dielectric elastomer like 3M VHB and PDMS. Finally, copper foil was chosen as the electrode material due to its faster and easier handling, and lower cost. In addition, it has the highest electrical conductivity among all. Fabrication of the dielectric elastomer actuator is introduced. 3M VHB 9473 tape and copper foil were selected as the dielectric layer and electrode. Dry film negative photoresist, ETERTEC HP-3410 was used to form the patterned masking on the substrate of copper foil. Meander pattern is designed for compliant electrodes in this project. Meander pattern is able to concentrate the elongation of the electrode in one direction. Finally, high-voltage actuation testing was conducted. The high-voltage testing shows plain electrodes of copper foil restrain elastomer layer and do not allow a planar expansion. On the other hand, meandered pattern electrodes (a design codenamed as S100-C100-G100) of copper foil show an expansion in width by 2.58%. A silver grease electrodes specimen also had been tested and result 6.71% of expansion in area at the same voltage.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Sim, Thiam Ling.
format Final Year Project
author Sim, Thiam Ling.
author_sort Sim, Thiam Ling.
title Micro-patterning of metallic electrodes for dielectric elastomer actuators
title_short Micro-patterning of metallic electrodes for dielectric elastomer actuators
title_full Micro-patterning of metallic electrodes for dielectric elastomer actuators
title_fullStr Micro-patterning of metallic electrodes for dielectric elastomer actuators
title_full_unstemmed Micro-patterning of metallic electrodes for dielectric elastomer actuators
title_sort micro-patterning of metallic electrodes for dielectric elastomer actuators
publishDate 2009
url http://hdl.handle.net/10356/16199
_version_ 1759854008424464384