Microfabrication and characterisation of thin films on rigid and flexible substrates

• Main Author: Tan, Justin Yang Yeh
• Other Authors: Lai Changquan
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2022
• Subjects: Engineering::Materials; Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/163430
• Institution: Nanyang Technological University

Investigation was carried out to determine optimal parameters suitable to produce patterned thin films on rigid and flexible substrates. Characterisation studies were performed on the films produced. The processes selected were based on having a low cost and being highly scalable. The report details...