Integrated factory control tower heatmap and dashboard

• Main Author: Halomoan, Marco
• Other Authors: Arokiaswami Alphones
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2022
• Subjects: Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/163599
• Institution: Nanyang Technological University

One of the most intricate production systems is the creation of semiconductor wafers. The common product processed throughout the wafer production process, a memory chip, necessitates hundreds of processing steps. A semiconductor fabrication facility, sometimes referred to as a FAB, processes multiple products at once. Specific processing devices, often known as tools in the semiconductor industry, are needed for each stage. To process wafers, massive fluxes between the tools and hundreds of various types of tools are needed. The tools involved are categorized under various modules such as Diffusion, Etching, Lithography, and more. If one of the tools malfunctioned, it would disturb the entire manufacturing process. It would cause delays in production or defects in the products, which cost the company time, budget and the customer’s trust. Therefore, there is a need for a monitoring system that will alert the engineers once error(s) are found. Web applications have been widely used and developed nowadays. This is mainly due to its simplicity (cross-platform, no download or installation required, auto update, no sophisticated hardware needed), great resources, and large community. Various frameworks, languages, and libraries have been introduced and continuously refined in the past decades. Not only limited to static HTML page, with numerous libraries and framework, it is possible to build a web application which dynamically obtains data from the server with sophisticated user interface. This project will display the construction of Factory Control Tower (FCT) heatmap web application. The heatmap allows user/ engineers to monitor the condition inside the fab, including tool status, physical location, Work-In-Progress (WIP), error message(s), and more. The heatmap will display all the information in real-time and with a user friendly interface.