Challenges and opportunities of chemiresistors based on microelectromechanical systems for chemical olfaction

• Main Authors: Guo, Mengya, Brewster II, James T., Zhang, Huacheng, Zhao, Yuxin, Zhao, Yanli
• Other Authors: School of Chemistry, Chemical Engineering and Biotechnology
• Format: Article
• Language: English
• Published: 2023
• Subjects: Science::Chemistry; Chemiresistors; Contact Engineering
• Online Access: https://hdl.handle.net/10356/165519
• Institution: Nanyang Technological University

Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.