Micro electromechanical systems (MEMS) switches analog and application

• Main Author: Wang, Zihao
• Other Authors: Nam Donguk
• Format: Thesis-Master by Coursework
• Language: English
• Published: Nanyang Technological University 2023
• Subjects: Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/166504
• Institution: Nanyang Technological University

Micro-electro-mechanical systems (MEMS) switches are considered as a promising alternative to traditional electronic switches due to their small size, low power consumption, and high switching speed. MEMS switches are based on the mechanical motion of a beam, which is driven by an electrostatic forc...