Selective staining on non-volatile memory cells for data retrieval

• Main Authors: Zeng, Xiaomei, Liu, Qing, Tay, Jing Yun, Gan, Chee Lip
• 其他作者: School of Materials Science and Engineering
• 格式: Article
• 語言: English
• 出版: 2023
• 主題: Engineering::Materials; Data Retrieval; Non-Volatile Memory
• 在線閱讀: https://hdl.handle.net/10356/167780

A new data retrieval approach utilizing selective staining is explored to differentiate '0' from '1' cells in EEPROM and Flash memory with node sizes of 40 nm and 250 nm. A two-step staining process based on selective oxide etching and copper galvanic displacement deposition is i...