A 206-nm all-solid-state deep-ultraviolet laser with 291 MW peak power

We successfully demonstrate the generation of an all-solid-state deep-ultraviolet (DUV) laser at 206 nm through the fifth (4 + 1)-harmonic generation using a 197-W, 10-kHz, 1.2-ps, 1,030-nm Yb:YAG laser. The DUV laser delivers 180 μJ–582 fs pulses with a peak power of 291 MW, which, to the best of o...

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Bibliographic Details
Main Authors: Ran, Qiandong, Short, Joel Stephen, Wang, Qi Jie, Li, Hao
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2023
Subjects:
Online Access:https://hdl.handle.net/10356/169375
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Institution: Nanyang Technological University
Language: English
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Summary:We successfully demonstrate the generation of an all-solid-state deep-ultraviolet (DUV) laser at 206 nm through the fifth (4 + 1)-harmonic generation using a 197-W, 10-kHz, 1.2-ps, 1,030-nm Yb:YAG laser. The DUV laser delivers 180 μJ–582 fs pulses with a peak power of 291 MW, which, to the best of our knowledge, is the highest peak power at 206 nm ever produced by all-solid-state kHz DUV laser sources driven at 1  μm wavelength. This corresponds to one order of magnitude improvement from early state-of-the-art record reported in the literature.