Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution

• Main Authors: Liu, Zhihao, Hu, Guangwei, Ye, Huapeng, Wei, Miaoyang, Guo, Zhenghao, Chen, Kexu, Liu, Chen, Tang, Biao, Zhou, Guofu
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2023
• Subjects: Engineering::Electrical and electronic engineering; Chemical Modification; Cost Effectiveness
• Online Access: https://hdl.handle.net/10356/169610
• Institution: Nanyang Technological University

Microlens arrays (MLAs) based on the selective wetting have opened new avenues for developing compact and miniaturized imaging and display techniques with ultrahigh resolution beyond the traditional bulky and volumetric optics. However, the selective wetting lenses explored so far have been constrained by the lack of precisely defined pattern for highly controllable wettability contrast, thus limiting the available droplet curvature and numerical aperture, which is a major challenge towards the practical high-performance MLAs. Here we report a mold-free and self-assembly approach of mass-production of scalable MLAs, which can also have ultrasmooth surface, ultrahigh resolution, and the large tuning range of the curvatures. The selective surface modification based on tunable oxygen plasma can facilitate the precise pattern with adjusted chemical contrast, thus creating large-scale microdroplets array with controlled curvature. The numerical aperture of the MLAs can be up to 0.26 and precisely tuned by adjusting the modification intensity or the droplet dose. The fabricated MLAs have high-quality surface with subnanometer roughness and allow for record-high resolution imaging up to equivalently 10,328 ppi, as we demonstrated. This study shows a cost-effective roadmap for mass-production of high-performance MLAs, which may find applications in the rapid proliferating integral imaging industry and high-resolution display.