LabVIEW based automation to laser molecular beam epitaxy

• Main Author: Teo, Janice Qin Yun.
• Other Authors: Zhu Weiguang
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• Online Access: http://hdl.handle.net/10356/17584
• Institution: Nanyang Technological University

The continuous advancement of the microelectronic technology, particularly on the shrinking dimensions in CMOS and MOSFET devices, has spurred significant improvements in epitaxy techniques over the few decades. To develop a coherent epitaxy system for facilitating improved research works, a highly...