Electrical and physical property study of thin films grown by laser molecular beam epitaxy
In this project, 50nm/100nm-thick epitaxial SrRuO3 and BaTiO3 thin films were grown on <100>, <110> and <111> SrTiO3 substrates by Laser Molecular Beam Epitaxy (LMBE) at 650°C. Lift-off process is performed to create the metallic contact for the resistivity characterization on Sr...
محفوظ في:
المؤلف الرئيسي: | |
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مؤلفون آخرون: | |
التنسيق: | Final Year Project |
اللغة: | English |
منشور في: |
2009
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الموضوعات: | |
الوصول للمادة أونلاين: | http://hdl.handle.net/10356/17882 |
الوسوم: |
إضافة وسم
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الملخص: | In this project, 50nm/100nm-thick epitaxial SrRuO3 and BaTiO3 thin films were grown on <100>, <110> and <111> SrTiO3 substrates by Laser Molecular Beam Epitaxy (LMBE) at 650°C. Lift-off process is performed to create the metallic contact for the resistivity characterization on SrRuO3/ SrTiO3 and capacitance characterization on BaTiO3/ SrTiO3.
The experiment result shows that the resistivity is dependent on the film crystal orientation. The resistivity of <100> SrRuO3/ SrTiO3 is the lowest, followed by the resistivity of <111> SrRuO3/ SrTiO3 and the resistivity of <110> SrRuO3/ SrTiO3 is the highest.
The ferroelectricity of BaTiO3 makes it a suitable material to make capacitor due to its high dielectric constant. This is critical as it allows a thicker insulating layer while maintaining a high capacitance to reduce the resulting leakage current. |
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