Characterization and analysis of semiconductor magnetic sensors: hall devices

• Main Author: Huang, Haoyang
• Other Authors: Goh Wang Ling
• Format: Thesis-Master by Coursework
• Language: English
• Published: Nanyang Technological University 2025
• Subjects: Engineering
• Online Access: https://hdl.handle.net/10356/183031
• Institution: Nanyang Technological University

With the development of technologies, sensors have been playing an essential role in the overall intelligent. In the sensor field, magnetic sensors are capable not only of detecting magnetic fields but also of measuring parameters such as pressure, position, angular velocity and current. In recent years, the magnetic sensor market has reached billions of dollars annually worldwide, with Hall effect sensors taking a significant share. This is primarily due to the fact that the detection range of Hall effect sensors aligns well with the magnetic fields generated by various materials. Moreover, Hall effect sensors are compatible with CMOS technology, offering a cost advantage over other magnetic sensors, as they can be integrated into a single chip alongside the signal conditioning circuitry and digital processing. This project mainly involves characterization of advanced Hall sensors with the Future Rich CMOS team at GlobalFoundries Singapore. The focus is on studying the semiconductor physics related to the Hall effects based on detailed device characterization and analysis of test data obtained from the most advanced Hall sensor. Data collected from parametric analysers and other departments within GlobalFoundries are processed automatically using customized script, followed by further analysis. Effects of both bias and temperature are studied and analysis are presented. Moreover, Python scripts which are capable of automatically processing various raw data are developed, enabling hundreds of data being reformatted in seconds. Investigations based on obtained data could instruct engineers to develop more powerful devices. Continuous collaboration with other teams ensures alignment with industry standards and customer requirements, driving the advancement of semiconductor magnetic sensor technology and securing the leadership in manufacturing magnetic sensor in foundry industries.