Development of carbon nanotubes for interconnection applications

• Main Author: Yung, Wendy Ka Po
• Other Authors: Wei Jun
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/18692
• Institution: Nanyang Technological University

This thesis records the development of carbon nanotubes (CNTs) material, fabrication techniques and process for interconnection application in very-large-scale integration (VLSI) and flip chip interconnects. For CNT to be used as VLSI interconnect, a self assembly fabrication technique for joining i...