Experimental investigation of pupil-fill factors as process window indicators for dry optical lithography
The underlying fundamental working principle of a OPL system is an inverse of the microscope. Instead of projecting a magnified image from a small object, a step-scan machine, as an OPL system is alternatively known, produces either a demagnified aerial image in air or a demagnified latent image in...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2009
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| Online Access: | http://hdl.handle.net/10356/18842 |
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| Institution: | Nanyang Technological University |
| Language: | English |