Controller design for nonlinear micromachined parallel plate actuators

• Main Author: Nikapanah Mohammad Hossein
• Other Authors: Wang Youyi
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/19275
• Institution: Nanyang Technological University

The use of electrostatic actuation for microelectromechanical systems (MEMS) is attractive because of the high energy densities and large forces available in microscale devices. Nonlinear micromachined electrostatic parallel plate microactuators which work by electrostatic actuation, play an importa...