Material removal utilizing electrokinetic phenomenon on amorphous aluminium surfaces

• المؤلف الرئيسي: Chua, Janet Min Chien.
• مؤلفون آخرون: David Lee Butler
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2010
• الموضوعات: DRNTU::Engineering::Materials::Mechanical strength of materials
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/20788
• المؤسسة: Nanyang Technological University

To satisfy the global market demand in producing ever-smaller scales devices with higher dimensional accuracy and functional efficiency, material removal in nanometric level has become a huge interest and a great challenge. In order to have higher performance and reliability of miniaturized devices,...