Material removal utilizing electrokinetic phenomenon on amorphous aluminium surfaces

• Main Author: Chua, Janet Min Chien.
• Other Authors: David Lee Butler
• Format: Final Year Project
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Materials::Mechanical strength of materials
• Online Access: http://hdl.handle.net/10356/20788
• Institution: Nanyang Technological University

To satisfy the global market demand in producing ever-smaller scales devices with higher dimensional accuracy and functional efficiency, material removal in nanometric level has become a huge interest and a great challenge. In order to have higher performance and reliability of miniaturized devices,...