Low temperature growth and characterization of carbon nanostructures

• Main Author: Ding, Yu
• Other Authors: Tay Beng Kang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/3528
• Institution: Nanyang Technological University

Carbon nanostructures, such as carbon onions and carbon nanotubes, have attracted tremendous research interest for the last decade due to their superior physical and chemical properties and promising applications. But most of the current fabrication processes require high temperature, which causes problems like long cycle time, non-cost effective and substrate melting temperature restriction. Therefore developing low temperature synthesis of carbon nanostructures is of great scientific and practical significance. This report focuses on the low temperature fabrication and characterization of carbon nanostructures such as onion-like carbon and carbon nanotubes (CNTs). Onion-like carbons were grown on different substrates at room temperature using plasma enhanced chemical vapor deposition (PECVD). Aligned CNT forest was synthesized using a water-assisted PECVD process.