Fabrication of micro structure for micro systems
79 p.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2010
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/36061 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| id |
sg-ntu-dr.10356-36061 |
|---|---|
| record_format |
dspace |
| spelling |
sg-ntu-dr.10356-360612023-03-11T17:00:12Z Fabrication of micro structure for micro systems Kaliyaperumal Boobalan Zhong Zhaowei School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing 79 p. This project aims to fabricate cost effective micro structures using micro patterning related technologies. Fundamental investigations are conducted using poly methyl methacrylate (PMMA) as the substrate material in the imprinting of micro structures. The fabrication methods deployed here are master mold, nickel metal mold and imprinting techniques. The fabrication of micro grating patterns and holes with cross sectional profile are demonstrated by Nanoimprinting lithography using replicated Ni mold. The master mold pattern is fabricated using UV photolithography, where resist grating patterns and holes in the order of microns are successfully obtained by Shipley SPR 660 photoresist on silicon substrate. Using the Shipley SPR 660 photoresist as a master pattern, the replicated mold is fabricated by nickel electroplating. Fine micro grating patterns and holes are successfully transferred to PMMA thermoplastics by nanoimprinting lithography using the Ni replicated mold. A detailed study of the contact angle measurement has been performed to avoid adhesion problem during the detachment of the mold from the substrate. Furthermore, the uniformity of the gratings pattern, thickness and width are analyzed using Taylor Hobson stylus profilometer and optical microscope. Master of Science (Precision Engineering) 2010-04-23T02:26:02Z 2010-04-23T02:26:02Z 2006 2006 Thesis http://hdl.handle.net/10356/36061 application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Manufacturing |
| spellingShingle |
DRNTU::Engineering::Manufacturing Kaliyaperumal Boobalan Fabrication of micro structure for micro systems |
| description |
79 p. |
| author2 |
Zhong Zhaowei |
| author_facet |
Zhong Zhaowei Kaliyaperumal Boobalan |
| format |
Theses and Dissertations |
| author |
Kaliyaperumal Boobalan |
| author_sort |
Kaliyaperumal Boobalan |
| title |
Fabrication of micro structure for micro systems |
| title_short |
Fabrication of micro structure for micro systems |
| title_full |
Fabrication of micro structure for micro systems |
| title_fullStr |
Fabrication of micro structure for micro systems |
| title_full_unstemmed |
Fabrication of micro structure for micro systems |
| title_sort |
fabrication of micro structure for micro systems |
| publishDate |
2010 |
| url |
http://hdl.handle.net/10356/36061 |
| _version_ |
1761781548804210688 |