Investigation of process parameter variation on properties of magnetron sputtered p-type Bi0.5Sb1.5Te3 thermoelectric thin films
An investigation on the effects of process parameter variation of magnetron sputtering on the properties of p-type Bi0.5Sb1.5Te3 thin films was conducted in this study. Working pressure and gas flow, substrate temperature, and annealing were varied for a total of 8 samples. The composition, surface...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2010
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| Online Access: | http://hdl.handle.net/10356/38928 |
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| Institution: | Nanyang Technological University |
| Language: | English |
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